Fabrication of field emission element with small apex angle of e

Details Fabrication of field emission element with small apex angle of e Fabrication of field emission element with small apex angle of e

1997-01-03

1999-03-23

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, H01J 902

Patent

active

058851240

ABSTRACT:
A method of fabricating a field emission element includes the steps of: forming an overhang portion in a substrate, the overhang portion including two opposing parts in cross section; depositing a sacrificial film on the overhang portion with two opposing parts, the sacrificial film including two opposing parts in cross section; chemically reacting the sacrificial film with two opposing parts to expand the volume of the sacrificial film and make the two opposing parts partially contact each other; depositing a field emission cathode film on the sacrificial film with contacted two opposing parts; and removing part of, or the whole of, the sacrificial film to expose a tip of the field emission cathode film.

REFERENCES:
patent: 5141459 (1992-08-01), Zimmerman
patent: 5203731 (1993-04-01), Zimmerman
patent: 5334908 (1994-08-01), Zimmerman
patent: 5720641 (1998-02-01), Hattori
patent: 5720642 (1998-02-01), Hattori
patent: 5749762 (1998-05-01), Nakamoto et al.

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