Fabrication of field emission element with sharp emitter tip

Details Fabrication of field emission element with sharp emitter tip Fabrication of field emission element with sharp emitter tip

1997-04-03

1999-10-26

O'Shea, Sandra

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

445 24, H01J 904

Patent

active

059718250

ABSTRACT:
A method of manufacturing a field emission element includes the steps of: forming an overhang portion on a substrate, the overhang portion having a cross section with confronting two parts; depositing a first sacrificial film on the overhang portion with the two parts, the first sacrificial film having a cross section with two parts; depositing a reaction control film on the first sacrificial film with the two parts, the first sacrificial film controlling chemical reaction of the first sacrificial film and having a cross section with two parts; chemically react the first sacrificial film so as to make the two parts of the first sacrificial film contact each other; depositing a field emission cathode film on the contacted area of the first sacrificial film; and exposing a tip of the field emission cathode film.

REFERENCES:
patent: 5141459 (1992-08-01), Zimmerman
patent: 5203731 (1993-04-01), Zimmerman
patent: 5334908 (1994-08-01), Zimmerman
patent: 5529524 (1996-06-01), Jones
patent: 5534743 (1996-07-01), Jones et al.
patent: 5548181 (1996-08-01), Jones
patent: 5561339 (1996-10-01), Jones et al.
patent: 5587623 (1996-12-01), Jones
patent: 5720641 (1998-02-01), Hattori
patent: 5720642 (1998-02-01), Hattori
patent: 5795208 (1998-08-01), Hattori

Affiliated with

Also associated with

Rating

Fabrication of field emission element with sharp emitter tip does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fabrication of field emission element with sharp emitter tip, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication of field emission element with sharp emitter tip will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-757462