Fabrication of ferrite films using laser deposition

Coating processes – Direct application of electrical – magnetic – wave – or... – Electromagnetic or particulate radiation utilized

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Details

427561, 4271262, 4271266, 427128, 427131, B05D 306, B05D 512

Patent

active

053208811

ABSTRACT:
A method is provided for fabricating a thin film of ferrite material upon a variety of substrates wherein pulsed high power laser light impinges upon a target of ferrite material causing localized vaporization of the ferrite material and subsequent deposition upon a proximate substrate. The rapidity with which the target material is vaporized promotes chemical stability during ferrite film growth. Both the target and the substrate are maintained inside a vacuum chamber, and are maintained substantially within a temperature range of 550.degree.-900.degree. C. The equipment needed to practice the method is relatively inexpensive. Furthermore, the method allows for the large-scale production of high quality ferrite films with preferential magnetic texture, wherein the magnetization of the ferrite material aligns in a preferred direction in the plane of the film.

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