Fabrication of electron-emitting structures using charged-partic

Details Fabrication of electron-emitting structures using charged-partic Fabrication of electron-emitting structures using charged-partic

1994-06-29

1997-03-04

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

313309, H01J 902

Patent

active

056073356

ABSTRACT:
An electron emitter suitable for a flat-panel CRT display is fabricated by a process in which charged particles are passed through a track layer (144) to create charged-particle tracks (146.sub.1). The track layer is etched along the tracks to form apertures (148.sub.1) that are employed in defining corresponding cap regions (150A) over an underlying emitter layer (142). After removing the track layer, part of the emitter layer is removed using the cap regions as masks to control the extent of the emitter material removed. Electron-emissive elements (142D), typically in the shape of cones, are thereby formed in the remainder (142C) of the emitter layer. The electron emitter can also be provided with a gate electrode (158C).

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