Fabrication of discrete thin film wiring structures

Details Fabrication of discrete thin film wiring structures Fabrication of discrete thin film wiring structures

1991-10-29

1993-07-06

Rosenbaum, Mark

Metal working

Method of mechanical manufacture

Electrical device making

29846, H01K 310

Patent

active

052242650

ABSTRACT:
Multilayer thin film structures are fabricated in a parallel manner by creating testable sub-units and then joining them together to form a finished three-dimensional wiring matrix. Thus, there is disclosed a process for the fabrication of a thin film wiring structure including the steps of:

REFERENCES:
patent: 3187426 (1965-06-01), Prohofsky
patent: 4868350 (1989-09-01), Hoffarth et al.
patent: 5129142 (1992-07-01), Bindra et al.
patent: 5142775 (1992-09-01), Wiley

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