Fabrication of devices with fibers engaged to grooves on...

Details Fabrication of devices with fibers engaged to grooves on... Fabrication of devices with fibers engaged to grooves on...

2005-03-22

2005-03-22

Nguyen, Dung Van (Department: 3723)

Abrading

Work holder

C451S460000

Reexamination Certificate

active

06869347

ABSTRACT:
Fabrication techniques for polishing fibers engaged in grooves on substrates. A protection template assembly is disclosed to protect the unpolished portions of fibers. Chemical mechanical polishing may be used to achieve high fabrication throughput and high polishing uniformity. Optical monitoring may be used to monitor the polishing in real time.

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