Fabrication of cooling and heat transfer systems by...

Details Fabrication of cooling and heat transfer systems by... Fabrication of cooling and heat transfer systems by...

2004-11-23

2011-11-22

Banks, Derris (Department: 3729)

Metal working

Method of mechanical manufacture

Fluidic or fluid actuated device making

C029S527100, C029S825000, C029S592100, C205S067000, C427S457000, C427S058000, C427S099500, C204S450000, C204S471000, C204S485000

Reexamination Certificate

active

08061032

ABSTRACT:
A process for fabricating a metallic component is disclosed. The process includes performing multiple electroforming steps on an object to form metallic layers. The process includes performing between the electroforming steps masking and patterning steps using a non-conductive material. The resulting metallic component has either a single layer or multiple layers of cooling or heat transfer channels, which may be at right angles in adjacent layers. The non-conductive material can be removed during the process by a solvent or by melting. The object on which the metallic component is formed may be a flat or shaped mandrel from which the metallic component can be removed. The metallic component is particularly useful in forming optical components for use in extreme ultraviolet (EUV) systems and in cooling and heat transfer systems.

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PCT Written Opinion PCT/EP2004/013296.
PCT International Search Report PCT/EP2004/013296.
PCT Written Opinion PCT/EP2004/013296.

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