Fabrication of amorphous diamond films

Details Fabrication of amorphous diamond films Fabrication of amorphous diamond films

1993-04-16

1995-12-12

King, Roy V.

Coating processes

Direct application of electrical, magnetic, wave, or...

Electrical discharge

427249, 427122, 4272557, 427577, 423446, C23C 1626

Patent

active

054748160

ABSTRACT:
Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.

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patent: 5110679 (1992-05-01), Haller
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Hackh's Chemical Dictionary, Fourth Edition, 1969 p. 208.
D. R. McKenzie, D. Muller, B. A. Pailthorpe--"Compressive-Stress-Induced Formation of Thin-Film Tetrahedral Amorphous Carbon," Aug. 5, 1991, pp. 773-776, Physical Review Letters, vol. 67, No. 6.
D. F. Franceschini & C. A. Achete & F. L. Freire, Jr., "Internal Stress Reduction by nitrogen incorporation in Hard Amorphous Carbon Thin Films", Appl. Phys. Lett. 60(26) 29 Jun. 1992 pp. 3229-3231.
C. J. Tong & J. M. Sivertsen & C. Chang, "Structure and Bonding Studies of the C:N Thin Films Produced by rf Sputtering Method," J. Mater. Res., vol. 5, No. 11, Nov. 1990, pp. 2490-2496.
Crans-Montana, Switzerland, 1990, "Diamond and Related Materials," vol. 1, p. 61 (1991).

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