Fabrication of a charge-coupled device

Details Fabrication of a charge-coupled device Fabrication of a charge-coupled device

1975-01-02

1977-04-26

Tupman, W.

Metal working

Method of mechanical manufacture

Assembling or joining

29590, 357 24, 357 91, B01J 1700

Patent

active

040192474

ABSTRACT:
The fabrication of a charge-coupled device consists in forming an insulating layer in the form of a periodic series of insulating steps, in depositing a metallic layer on alternate steps so as to form electrodes, in implanting regions doped with a type opposite to the substrate into the surface of the semiconductor by directing an ion beam through the insulating steps of small thickness which are transparent to the beam, and in connecting each electrode to a control line.

REFERENCES:
patent: 3697786 (1972-10-01), Smith
patent: 3739237 (1973-06-01), Shannon
patent: 3796932 (1974-03-01), Amelio

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