Fabrication of a bipolar transistor with a polysilicon ribbon

Fishing – trapping – and vermin destroying

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437152, 437160, 437161, 437162, 437168, 437191, 437200, 357 34, H01L 2131, H01L 2122, H01L 21265, H01L 21302

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047229080

ABSTRACT:
In the fabrication of bipolar transistors by the single poly process, polysilicon sidewalls are formed along portions of a polysilicon layer that functions as a device contact. The sidewalls serve both as dopant sources which determine the width of underlying base and emitter regions, and as contacts to those devices. Since the thickness of the polysilicon sidewalls, and hence the width of the underlying device regions, are precisely controllable through conventional polysilicon deposition techniques, relatively relaxed design rules can be employed while making possible the formation of emitters having widths less than one-half of a micron.

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patent: 4599789 (1986-07-01), Gasner

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