Fabrication methods for bidirectional field emission devices and

Details Fabrication methods for bidirectional field emission devices and Fabrication methods for bidirectional field emission devices and

1992-09-25

1994-05-17

Fourson, George

Fishing, trapping, and vermin destroying

437203, 437228, 445 50, 313336, 3151691, H01L 2144

Patent

active

053127773

ABSTRACT:
Bidirectional field emission devices (FEDs) and associated fabrication methods are described. A basic device includes a first unitary field emission structure and an adjacently positioned, second unitary field emission structure. The first unitary structure has a first cathode portion and a first anode portion, while the second unitary structure has a second cathode portion and a second anode portion. The structures are positioned such that the first cathode portion opposes the second anode portion so that electrons may flow by field emission thereto and the second cathode portion opposes the first anode portion, again so that electrons may flow by field emission thereto. A control mechanism defines whether the device is active, while biasing voltages applied to the first and second unitary structures define the direction of current flow. Multiple applications exist for such a bidirectional FED. For example, an FED DRAM cell is discussed, as are methods for fabricating the various devices.

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