Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2006-10-10
2006-10-10
Baumeister, B. William (Department: 2891)
Semiconductor device manufacturing: process
Having organic semiconductive component
C438S149000, C438S151000, C438S158000, C438S758000, C438S216000, C257SE21703, C257SE21413, C257SE51007
Reexamination Certificate
active
07118937
ABSTRACT:
The present invention relates to a method of selectively depositing an organic semiconductor material and a method of manufacturing an organic semiconductor thin film transistor array. Since the thin film transistor array is formed by locally performing a plasma process on a substrate before depositing an organic semiconductor active layer on the substrate, the organic semiconductor material is deposited on only the organic semiconductor active layer having an island shape. Therefore, it is not necessary to use a shadow mask method or a photolithography method to manufacture an active matrix array. Accordingly, the present invention has advantages in that it is possible to obtain a high resolution thin film transistor array and to prevent characteristics of the thin film transistors in the array from being deteriorated.
REFERENCES:
patent: 5107308 (1992-04-01), Koezuka et al.
patent: 6413790 (2002-07-01), Duthaler et al.
patent: 6433359 (2002-08-01), Kelley et al.
patent: 6683333 (2004-01-01), Kazlas et al.
patent: 6734038 (2004-05-01), Shtein et al.
patent: 6795133 (2004-09-01), Deane
patent: 6795151 (2004-09-01), Lee
patent: 6808972 (2004-10-01), Sirringhaus et al.
patent: 6828582 (2004-12-01), Ando et al.
patent: 6905906 (2005-06-01), Sirringhaus et al.
patent: 6972261 (2005-12-01), Wong et al.
patent: 2003/0060038 (2003-03-01), Sirringhaus et al.
patent: 2003/0156079 (2003-08-01), Nakanishi
patent: 2005/0001968 (2005-01-01), Yamazaki et al.
patent: 2005/0151820 (2005-07-01), Sirringhaus et al.
Choi Hye-Young
Jang Jin
Kim Sung-Hwan
Anya Igwe U.
Baumeister B. William
Jang Jin
Morgan & Finnegan , LLP
LandOfFree
Fabrication method of thin-film transistor array with... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Fabrication method of thin-film transistor array with..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication method of thin-film transistor array with... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3631157