Coating processes – Electrical product produced – Superconductor
Patent
1994-06-13
1995-10-31
King, Roy V.
Coating processes
Electrical product produced
Superconductor
427 62, 505874, 505819, 505820, 20419222, 216 3, B05D 512, H01L 3924
Patent
active
054627621
ABSTRACT:
A method of fabricating a superconducting quantum interference device (DC-SQUID) constructed from short weak links with untrafine wires. The method comprises the following steps: successive forming a niobium nitride film and a silicon nitride film on a substrate; oblique etching of the niobium nitride film and said silicon nitride film with respect to the substrate by a reactive ion etching process using a mixture of oxygen and CF.sub.4 gases to form an olique edge; and successive forming a barrier thin film and a counterelectrode of niobium on the said edge. The short weak links wire fabricated by field evaporation technique. The counterelectrode material were field-evaporated and formed the conductive paths in the pinholes in the insulating thin film.
REFERENCES:
patent: 4560435 (1985-12-01), Brown et al.
Iwanyshyn et al., "A study of evaporated superconducting weak-link junctions," Canadian Journal Of Physics, vol. 48, 1970, pp. 470-476.
Pascal, D., "Simple Fabrication and Characterization of Thin-Film Niobium Squid's Working at 4.2 K," Squid '80, .COPYRGT. 1980 Walter de Gruyter & Co., Berlin-- new York, pp. 417-422.
Track et al., "Modulation of the Penetration Depth of Nb and NbN Films by Quasiparticle Injection," IEEE Transactions On Magnetics, vol. 25, No. 2, Mar. 1989, pp. 1096-1099.
Hunt et al., "NbN/MgO/NbN edge-geometry tunnel junctions," Appl. Phys. Lett., vol. 55, No. 1, Jun. 3, 1989, pp. 81-86.
Sprik et al., "Transient response to quasiparticle injected superconducting links," Appl. Phys. Lett., vol. 55, No. 5, 31 Jul. 1989, New York, N.Y., pp. 489-491.
Martinis et al., "Fabrication of ultrasmall Nb--AlO.sub.x --Nb Josephson tunnel junctions," Appl. Phys. Lett., vol. 57, No. 6, 6 Aug. 1990, New York, N.Y., pp. 629-631.
Huq et al., "Fabrication of sub-micron whole-wafer SIS tunnel junctions for millimeter wave mixers," IEEE Transactions On Magnetics, vol. 27, No. 2, Mar. 1991, pp. 3161-3164.
Abe et al., "Fabrication of thin film Nb--(fine Nb wires)--NbN weak links for superconducting quantum interference device applications", Appl. Phys. Lett., vol. 61, No. 9, Aug. 31, 1992, pp. 1131-1133.
Hamasaki Katsuyoshi
Onuma Yoshio
King Roy V.
Shinko Electric Industries Co. Ltd.
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