Fabrication method of polarization-controlled surface-emitting l

Details Fabrication method of polarization-controlled surface-emitting l Fabrication method of polarization-controlled surface-emitting l

1996-05-01

1998-01-27

Tsai, Jey

Fishing, trapping, and vermin destroying

437 15, 437127, 437905, 148DIG95, 148DIG99, H01L 2120

Patent

active

057121885

ABSTRACT:
A fabrication method of a surface-emitting laser diode which permits easy control of polarization in a desired direction is disclosed. The laser emits light from an emitting surface having a sidewall inclined with respect to a normal to the emitting surface. An ion beam is provided for etching the inclined sidewall of the laser and a substrate is positioned having a face which is formed into the emitting surface in the ion beam to cause the ion beam to intercept a sidewall of the substrate to form the

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