Fabrication method of micro tip for field emission display devic

Details Fabrication method of micro tip for field emission display devic Fabrication method of micro tip for field emission display devic

1996-11-08

1999-01-26

Grumbling, Matthew V.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, 216 11, 216 24, 216 41, 216 87, H01J 902

Patent

active

058632328

ABSTRACT:
A method for making a micro tip of an FED device includes the steps converting impurity layer regions into porous semiconductor layer regions by performing an anodic reaction using an HF aqueous solution as an electrolytic solution, oxidizing the porous silicon layer regions, and removing the oxidation layer by etching with HF aqueous solution. The shape of the fabricated micro tip is regular and precise, since the size and height of the micro tip are easily controlled. Hence, the size and direction of an electron beam emitted from the micro tip is regular, and a reliability of the FED device is enhanced.

REFERENCES:
patent: 4763187 (1988-08-01), Biberian
patent: 5277638 (1994-01-01), Lee
patent: 5420054 (1995-05-01), Choi et al.
patent: 5505649 (1996-04-01), Park
patent: 5532177 (1996-07-01), Cathey
patent: 5628661 (1997-05-01), Kim et al.

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