Fabrication method of an electrostatic discharge protection...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of...

Reexamination Certificate

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C438S322000, C257S355000

Reexamination Certificate

active

06855611

ABSTRACT:
A fabrication method of an electrostatic discharge protection circuit is described, in which a buried layer is formed in the substrate of the electrostatic discharge protection circuit, and a sinker layer electrically connected to the buried layer and a drain is also formed therein. Thereby, when the electrostatic discharge protection circuit is activated, the current flows from a source through the buried layer and the sinker layer to the drain. The current flow path is remote from the gate dielectric layer to avoid damaging the gate dielectric by a large current, so as to improve the dielectric strength of the electrostatic discharge protection circuit.

REFERENCES:
patent: 4574469 (1986-03-01), Mastroianni et al.
patent: 5581103 (1996-12-01), Mizukami
patent: 6159841 (2000-12-01), Williams et al.
patent: 6303964 (2001-10-01), Pulvirenti et al.
patent: 6365932 (2002-04-01), Kouno et al.
patent: 6424013 (2002-07-01), Steinhoff et al.

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