Fabrication method and structure of optical waveguides

Details Fabrication method and structure of optical waveguides Fabrication method and structure of optical waveguides

1990-07-24

1991-05-28

Lee, John D.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419226, 350320, G02B 610

Patent

active

050188097

ABSTRACT:
An optical waveguide fabrication technique utilizing a self-aligned cladding, in which an efficient and reliable optical waveguide can be fabricated with minimum proton exchange; the guided mode property of the optical waveguide can be widely adjusted; and the optical waveguides can be fabricated in various types.

REFERENCES:
patent: 4695121 (1987-09-01), Mahapatra et al.
patent: 4725774 (1988-02-01), Davis et al.
patent: 4755014 (1988-07-01), Stoll et al.
patent: 4778236 (1988-10-01), Miyawaki
patent: 4799750 (1989-01-01), Miyawaki

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