Fabrication method and structure for multilayer optical anti-ref

Details Fabrication method and structure for multilayer optical anti-ref Fabrication method and structure for multilayer optical anti-ref

1997-05-19

1999-11-30

Bell, Janyce

Coating processes

Optical element produced

4272481, 427166, 427167, 427255, 4274192, 4274193, B05D 506

Patent

active

059938986

ABSTRACT:
An optical anti-reflection coating having multiple layers, where at least some of the layers are formed by a dry coating process and other layers are formed by a wet coating process. This combination of different types of anti-reflection layers provides superior performance in terms of low reflectance over a wide bandwidth of incident light wavelengths, and also low reflectance over a wide range of incident light angles. This is accomplished using fewer layers than would be needed using all dry process layers in the ARC. Alternatively, one may obtain an ARC having performance equivalent to that of an all dry process layer ARC but using fewer layers by using the combination of a wet process and a dry process. Furthermore, this combination of wet process and dry process layers provides a high performance anti-reflection coating which cannot be fabricated using only a dry process.

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