Fabrication method and equipment for diffraction gratings

Details Fabrication method and equipment for diffraction gratings Fabrication method and equipment for diffraction gratings

1986-07-18

1988-12-20

Arnold, Bruce Y.

350 383, 3501622, 350163, G02B 532, G03H 104

Patent

active

047921978

ABSTRACT:
A method and equipment for fabricating two diffraction gratings having the same period but phases that are shifted by .lambda./4 on a work to be treated. A laser beam is divided into two light beams and one of the beams is delayed over a portion of the light beam. The divided light beams are then mixed together so that they interfere. Using the known photolithography technology, the interference patterns are formed into diffraction gratings.

REFERENCES:
patent: 3650605 (1972-03-01), Little, Jr.
patent: 3708217 (1973-01-01), McMahon
patent: 4412719 (1983-11-01), Fienup

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