Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-08-15
2006-08-15
Barnes, Crystal J. (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S015000, C700S016000, C707S793000, C707S793000, C707S793000, C715S252000, C715S808000, C715S809000
Reexamination Certificate
active
07092778
ABSTRACT:
Systems and methods for semiconductor fabrication management. A processing unit receives an engineering change request (ECR) comprising information regarding new engineering for a wafer lot, generates an ECR reminder comprising information regarding the ECR request, transmits the ECR reminder to a client operator through a communication device, receives a reply corresponding to the ECR reminder, determines a reply result indicating whether the ECR is accepted by detecting the reply, and transmits the reply result to a manufacturing execution system (MES).
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Taiwan Patent Office Action.
Huang Chen-Chu
Lee Howard C. H.
Ting Yu-Chen
Barnes Crystal J.
Taiwan Semiconductor Manufacturing Co. Ltd.
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