Fabrication management systems and methods

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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Details

C700S015000, C700S016000, C707S793000, C707S793000, C707S793000, C715S252000, C715S808000, C715S809000

Reexamination Certificate

active

07092778

ABSTRACT:
Systems and methods for semiconductor fabrication management. A processing unit receives an engineering change request (ECR) comprising information regarding new engineering for a wafer lot, generates an ECR reminder comprising information regarding the ECR request, transmits the ECR reminder to a client operator through a communication device, receives a reply corresponding to the ECR reminder, determines a reply result indicating whether the ECR is accepted by detecting the reply, and transmits the reply result to a manufacturing execution system (MES).

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Taiwan Patent Office Action.

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