Fabrication and test methods and systems

Details Fabrication and test methods and systems Fabrication and test methods and systems

2009-06-08

2010-10-26

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500, C356S369000, C438S016000, C438S014000

Reexamination Certificate

active

07821627

ABSTRACT:
Methods and systems for fabricating and testing semiconductor devices are disclosed. In one embodiment, a method of forming a material includes providing a first workpiece, forming a material on the first workpiece using a first process condition, and measuring a defect state of the material using a test that utilizes a monochromatic light source. If the defect state is below a predetermined value, the material is formed on at least one second workpiece using the first process condition.

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