Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Thermally responsive
Reexamination Certificate
2010-06-03
2011-11-29
Jackson, Jr., Jerome (Department: 2815)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Thermally responsive
C257S003000, C257SE45002
Reexamination Certificate
active
08067260
ABSTRACT:
A small critical dimension element, such as a heater for an ovonic unified memory, may be formed within a pore by using successive sidewall spacers. The use of at least two successive spacers enables the limitations imposed by lithography and the limitations imposed by bread loafing be overcome to provide reduced critical dimension elements.
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patent: 2006/0175597 (2006-08-01), Happ
Jin Ming
Karpov Ilya V.
Lee Jin-wook
Ramanuja Narahari
Budd Paul
Jackson, Jr. Jerome
Micro)n Technology, Inc.
Trop Pruner & Hu P.C.
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