Fishing – trapping – and vermin destroying
Patent
1986-01-07
1987-08-11
Hearn, Brian E.
Fishing, trapping, and vermin destroying
357 236, 357 51, 156652, 156634, 427 79, 437245, 29 2542, H01L 2710, H01L 2704, G11C 1134
Patent
active
046851976
ABSTRACT:
The present invention provides a structure and method for fabricating that structure which provides increased capacitance over the prior art while occupying a minimum of surface area of the integrated circuit. The present invention accomplishes this by interleaving multiple capacitor plates to provide increased capacitance while occupying the same surface area as a prior art capacitor providing a fraction of the capacitance provided by the present invention. The present invention is fabricated by providing a capacitor stack which includes interleaved plates of material which may be selectively etched and which is separated by appropriate dielectric material. One portion of the stack is masked while one set of the interleave plates is etched. The etched portion of the interleave plates is filled by a suitable dielectric and a contact is made to the remaining plates. A different portion of the stack is then exposed to an etch which etches the other set of interleave plates. The area etched away is then filled with a suitable dielectric and a contact is made to the unetched interleaved plates. Thus a fully interleaved capacitor is provided using relatively simple fabrication techniques while still providing increased capacitance.
REFERENCES:
patent: 4156249 (1979-05-01), Koo
patent: 4441249 (1984-04-01), Alspector et al.
patent: 4451841 (1984-05-01), Hori et al.
patent: 4455568 (1984-06-01), Shiota
patent: 4460911 (1984-07-01), Salters
Bailey, `Thin-Film Multilayer Capacitors Using Pyrolytically Deposited Silicon Dioxide`, IEEE Trans. on Parts, Hybrids, and Packaging, vol. PHP-1, pp. 361-364, Dec. 76.
Koyanagi, "Novel High Density, Stacked Capacitor MOS RAM", Japanese Journal of Applied Physics, vol. 18 (1979) Supplement 18-1, pp. 35-42.
Riemenschneider Bert R.
Tigelaar Howard L.
Groover Robert O.
Hearn Brian E.
Sharp Melvin
Sorensen Douglas A.
Texas Instruments Incorporated
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