Fabricating a photonic die

Details Fabricating a photonic die Fabricating a photonic die

2007-05-01

2007-05-01

Pak, Sung (Department: 2874)

Optical waveguides

Integrated optical circuit

C438S125000

Reexamination Certificate

active

11092489

ABSTRACT:
In one embodiment, a method includes forming an array of recesses in a substrate, depositing spacer material in the recesses, forming photonic elements on the spacer material, and separating the structure previously formed into individual dies that each include a photonic element, spacer material and substrate.

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