Fabri-Perot filter

Details Fabri-Perot filter Fabri-Perot filter

2006-12-26

2006-12-26

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

07154094

ABSTRACT:
A Fabri-Perot filter includes: a substrate; a first mirror disposed on the substrate; and a movable mirror unit facing the first mirror with a gap therebetween. The movable mirror unit is movable toward the first mirror in a case where a predetermined voltage is applied between the first mirror and the movable mirror unit so that the gap is changeable. The filter is capable of transmitting an infrared light having a predetermined wavelength corresponding to the gap. The movable mirror unit includes a center portion and a periphery portion, which is deformable easier than the center portion.

REFERENCES:
patent: 5589689 (1996-12-01), Koskinen
patent: 6078395 (2000-06-01), Jourdain et al.
patent: 6590710 (2003-07-01), Hara et al.
patent: 6813291 (2004-11-01), Wang et al.
patent: 2005/0017177 (2005-01-01), Tai et al.

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