Fab correlation system

Details Fab correlation system Fab correlation system

2005-04-12

2005-04-12

Niebling, John F. (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

C438S052000

Reexamination Certificate

active

06878560

ABSTRACT:
A system comprised of a plurality of fabs that are operatively coupled and share data from a common framework for correlating production. The fabs can be coupled via Internet, cellular, optical, landline, microwave and satellite communication means and the like. Data can be transferred to and/or received from a central, integrated correlating entity or from several distributed correlating entities. The fabs send and receive correlating data that relates to production information such as tolerances, critical dimensions, geometry and the like. The correlating entity(s) has the capability to increase production by performing probabilistic computations on the received correlating data and utilizing the resulting information to maintain correlating parameters at remote locations. The computations performed can include such calculations as Bayesian inferencing and the like. The system inherently precludes the necessity for physically transporting parametric test entities between different fab or tooling locations.

REFERENCES:
patent: 6303395 (2001-10-01), Nulman

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