F.sub.2 (157nm) laser employing neon as the buffer gas

Details F.sub.2 (157nm) laser employing neon as the buffer gas F.sub.2 (157nm) laser employing neon as the buffer gas

1999-05-24

2000-12-05

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 57, 372 34, H01S 322

Patent

active

06157662&

ABSTRACT:
An F.sub.2 -laser has a discharge chamber containing a laser gas mixture including fluorine as a laser active component and neon as a buffer gas. The gas mixture is surrounded by a resonator and supplied with a pulsed discharge by a pair of electrodes connected to a power supply circuit. The concentration of neon within the gas mixture is preferably higher than any other constituent gas, and is more preferably the only gas accompanying the laser active molecular fluorine. In addition, the gas mixture is preferably maintained at an elevated temperature such as near, yet below, a temperature at which outgassing occurs within the discharge chamber.

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