F-doped silica glass and process of making same

Details F-doped silica glass and process of making same F-doped silica glass and process of making same

2011-06-21

2011-06-21

Lorengo, Jerry (Department: 1731)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S057000, C065S030100, C065S111000, C065S017400

Reexamination Certificate

active

07964522

ABSTRACT:
An F-doped silica glass, a process for making the glass, an optical member comprising the glass, and an optical system comprising such optical member. The glass material comprises 0.1-5000 ppm by weight of fluorine. The glass material according to certain embodiments of the present invention has low polarization-induced birefringence, low LIWFD and low induced absorption at 193 nm.

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