Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2006-01-24
2008-12-02
Berman, Jack I (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
Reexamination Certificate
active
07459708
ABSTRACT:
To suppress the adherence of debris as a result of a radiating fuel, such as tin or the like, within a vessel for forming high density and high temperature plasma of an extreme UV radiation source device, and to eliminate deposited tin and/or tin compounds with high efficiency, hydrogen radical producing parts are provided in the vessel; and hydrogen radicals are produced in the vessel so that deposition of tin and/or a tin compound is suppressed in the area with a low temperature of the device, such as a focusing mirror or the like, and the deposited tin and/or tin compound is eliminated.
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Inoue Masaki
Seki Kyohei
Sumitomo Taku
Yabuta Hironobu
Yoshioka Masaki
Berman Jack I
Safran David S.
Ushiodenki Kabushiki Kaisha
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