Extreme ultraviolet transition oscillator

Details Extreme ultraviolet transition oscillator Extreme ultraviolet transition oscillator

2005-06-07

2005-06-07

Vo, Tuyet Thi (Department: 2821)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S492200, C315S111810

Reexamination Certificate

active

06903354

ABSTRACT:
Systems and techniques to generate extreme ultraviolet (EUV) illumination. An EUV system includes first layers, and second layers interleaved with the first layers, where the first layers and the second layers have a thickness selected to produce coherent transition radiation in an extreme ultraviolet wavelength region when an electron beam passes through the first layers and the second layers. The first and second layers may be built using thin film deposition techniques and etching techniques. The first layers may include metal, such as molybdenum. The second layers may include a dielectric material and may define regions of vacuum between the first layers, including possibly multiple regions of vacuum per layer.

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