Extreme ultraviolet mask with molybdenum phase shifter

Details Extreme ultraviolet mask with molybdenum phase shifter Extreme ultraviolet mask with molybdenum phase shifter

2007-01-30

2007-01-30

Rosasco, S. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

10750122

ABSTRACT:
The present invention describes a method including: providing a substrate, the substrate including a first region and a second region; forming a multilayer mirror over the substrate; forming a phase-shifter layer over the multilayer mirror; forming a capping layer over the phase-shifter layer; removing the capping layer and the phase-shifter layer in the second region; illuminating the first region and the second region with EUV light; and reflecting the EUV light off the first region and the second region.The present invention also describes a structure including: a substrate, the substrate including a first region and a second region; a multilayer mirror located over the first region and the second region; a phase-shifter layer located over the multilayer mirror in the region; an intensity balancer layer located over the multilayer mirror in the second region; and a capping layer located over the phase-shifter layer in the first region and over the intensity balancer layer in the second region.

REFERENCES:
patent: 5935733 (1999-08-01), Scott et al.
patent: 6641959 (2003-11-01), Yan
patent: 6875543 (2005-04-01), Chapman et al.
patent: 2002/0146648 (2002-10-01), Ghandehari et al.
patent: 2003/0027053 (2003-02-01), Yan
patent: 2003/0054260 (2003-03-01), Dao et al.
patent: 2004/0091789 (2004-05-01), Han et al.
patent: 58033253 (1983-02-01), None
patent: 61270761 (1986-12-01), None
patent: PCT/US2004/043651 (2004-12-01), None

Affiliated with

Also associated with

Rating

Extreme ultraviolet mask with molybdenum phase shifter does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Extreme ultraviolet mask with molybdenum phase shifter, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Extreme ultraviolet mask with molybdenum phase shifter will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3723005