Extreme ultraviolet light source apparatus and nozzle...

Details Extreme ultraviolet light source apparatus and nozzle... Extreme ultraviolet light source apparatus and nozzle...

2011-08-23

2011-08-23

Kim, Robert (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S42300F, C250S424000, C250S425000, C250S493100, C250S494100

Reexamination Certificate

active

08003962

ABSTRACT:
A nozzle protection device capable of protecting a target nozzle from heat of plasma without disturbing formation of a stable flow of a target material in an LPP type EUV light source apparatus. This nozzle protection device includes a cooling unit which is formed with an opening for passing the target material therethrough, and which is formed with a flow path for circulating a cooling medium inside, and an actuator which changes a position or a shape of the cooling unit between a first state of evacuating the cooling unit from a trajectory of the target material and a second state of blocking heat radiation from the plasma to the nozzle by the cooling unit while securing a path of the target material in the cooling unit.

REFERENCES:
patent: 2002/0070353 (2002-06-01), Richardson
patent: 2004/0108473 (2004-06-01), Melnychuk et al.
patent: 2006/0043319 (2006-03-01), Gaebel et al.
patent: 2007/0170377 (2007-07-01), Nakano
patent: 2002-237448 (2002-08-01), None
patent: 2003-43199 (2003-02-01), None

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