Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2011-08-16
2011-08-16
Souw, Bernard E (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S42300F, C250S424000, C250S489000
Reexamination Certificate
active
07999241
ABSTRACT:
An extreme ultraviolet light source apparatus has a magnetic field generator which generates a magnetic field region around a direction of the magnetic field passing through a plasma region in which a plasma is to be generated and converges charged particles including ion emitted from the plasma region toward the direction of the magnetic field, a first charged particle collector (receiver) mounted at both sides of an axis of the magnetic field in the magnetic field region in order to collect (receive) the charged particles converged by the magnetic field, a target supply unit supplying a target from a nozzle located outside a converging region in which the charged particles are to be converged inside the magnetic field region in an extreme ultraviolet light generating chamber, and a target collector located at a position opposite to the nozzle, the target retrieval portion retrieving a residual target which does not contribute to generation of the plasma.
REFERENCES:
patent: 6987279 (2006-01-01), Hoshino et al.
patent: 7271401 (2007-09-01), Imai et al.
patent: 7705333 (2010-04-01), Komori et al.
patent: 7915600 (2011-03-01), Ueno et al.
patent: 2009/0224181 (2009-09-01), Abe et al.
patent: 2009/0261277 (2009-10-01), Soumagne et al.
patent: 2009/0272919 (2009-11-01), Abe et al.
patent: 2010/0078579 (2010-04-01), Endo et al.
patent: 2010/0090132 (2010-04-01), Endo et al.
patent: 2010/0108918 (2010-05-01), Nagai et al.
patent: 2010/0176312 (2010-07-01), Komori et al.
patent: 2010/0181503 (2010-07-01), Yanagida et al.
patent: 2010/0213395 (2010-08-01), Ueno et al.
patent: 2010/0243922 (2010-09-01), Asayama et al.
patent: 2005-197456 (2005-07-01), None
patent: 2007-207574 (2007-08-01), None
Abe Tamotsu
Ishihara Takanobu
Kakizaki Kouji
Nagai Shinji
Gigaphoton Inc.
McDermott Will & Emery LLP
Souw Bernard E
LandOfFree
Extreme ultraviolet light source apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Extreme ultraviolet light source apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Extreme ultraviolet light source apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2649216