Extreme ultraviolet light source apparatus

Details Extreme ultraviolet light source apparatus Extreme ultraviolet light source apparatus

2011-08-23

2011-08-23

Souw, Bernard E (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S42300F, C250S424000

Reexamination Certificate

active

08003963

ABSTRACT:
An extreme ultraviolet light source apparatus comprises a target supply unit supplying a target into a vacuum chamber, a laser oscillator outputting a laser light into the vacuum chamber, a collector mirror outputting an extreme ultraviolet light outside by reflecting the extreme ultraviolet light emitted from the target being ionized as a plasma by irradiation with the laser light at a plasma luminescence point in the vacuum chamber, and an ion debris removal unit at least a part of which is located in an obscuration region including the plasma luminescence point.

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patent: 2007/0158597 (2007-07-01), Fomenkov et al.
patent: 2008/0017801 (2008-01-01), Fomenkov et al.
patent: 2008/0087840 (2008-04-01), Ueno et al.
patent: 2008/0197297 (2008-08-01), Akins et al.
patent: 2010/0078579 (2010-04-01), Endo et al.
patent: 2010/0140513 (2010-06-01), Nagai et al.
patent: 2005-197456 (2005-07-01), None

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