Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2005-12-06
2005-12-06
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S493100, C378S119000
Reexamination Certificate
active
06972421
ABSTRACT:
The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
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Blumenstock Gerry M.
Bowering Norbert
Dyer Timothy S.
Fomenkov Igor V.
Hoffman Jerzy R.
Cray William C.
Cymar, Inc.
Cymer Inc.
Nguyen Kiet T.
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