Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-06-07
2010-10-19
Berman, Jack I (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S492100, C250S492230, C355S067000
Reexamination Certificate
active
07816658
ABSTRACT:
An extreme ultra-violet lithographic apparatus for imaging a pattern onto a substrate includes a radiation system constructed and arranged to provide a beam of an extreme ultra-violet radiation, and an absorber arranged in the beam and constructed and arranged to absorb at least a portion of the radiation beam. The absorber has a volume configured to accommodate a flow of an absorbing gas. The flow is directed in a transverse direction with respect to the beam. The absorber includes a structure having an extreme ultra-violet radiation-transmissive beam entry area and an extreme ultra-violet radiation-transmissive beam exit area. The apparatus also includes a gas inlet actuator array configured to inject the gas into the volume and a gas outlet actuator array arranged to evacuate the gas from the volume.
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Moors Johannes Hubertus Josephina
Van Schoot Jan Bernard Plechelmus
ASML Netherlands B.V.
Berman Jack I
Ippolito Rausch Nicole
Pillsbury Winthrop Shaw & Pittman LLP
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