Extreme ultra violet light source apparatus

Details Extreme ultra violet light source apparatus Extreme ultra violet light source apparatus

2008-02-19

2010-06-08

Vanore, David A (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S493100, C250S494100, C372S038070, C372S055000, C378S119000

Reexamination Certificate

active

07732794

ABSTRACT:
In an extreme ultra violet light source apparatus having a comparatively large output power for exposing, a solid target is supplied fast and continuously while heat dissipation for irradiation of a driver laser light is performed successfully. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target material supplying unit which coats a wire with target material, a wire supplying unit which supplies the wire coated with the target material to a predetermined position within the chamber, a driver laser which applies a laser beam onto the wire coated with the target material to generate plasma; and a collector mirror which collects the extreme ultra violet light radiated from the plasma and outputting the extreme ultra violet light.

REFERENCES:
patent: 7247870 (2007-07-01), Ershov et al.
patent: 7276710 (2007-10-01), Yamamoto et al.
patent: 7365351 (2008-04-01), Bowering et al.
patent: 7476886 (2009-01-01), Bykanov et al.
patent: 2008/0048133 (2008-02-01), Bykanov et al.
patent: 2008/0197298 (2008-08-01), Abe et al.
patent: 2008/0197299 (2008-08-01), Hoshino et al.
patent: 2009/0314967 (2009-12-01), Moriya et al.
patent: 11-250842 (1999-09-01), None
patent: 2006-244837 (2006-09-01), None

Affiliated with

Also associated with

Rating

Extreme ultra violet light source apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Extreme ultra violet light source apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Extreme ultra violet light source apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4242885