Extreme ultra violet light source apparatus

Details Extreme ultra violet light source apparatus Extreme ultra violet light source apparatus

2008-02-20

2010-11-30

Vanore, David A (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S493100, C250S494100, C250S42300F

Reexamination Certificate

active

07842937

ABSTRACT:
An extreme ultra violet light source apparatus by which EUV light can be efficiently obtained uses a driver laser which can realize a desired pulse width with substantially homogeneous intensity. The apparatus generates extreme ultra violet light by applying a laser beam to a target, and includes a chamber in which extreme ultra violet light is generated; a target supply unit which supplies a liquid or solid metal target to a predetermined position within the chamber; a laser beam generating unit which synthesizes pulse laser beams having delays different from one another to generate a single pulse laser beam or a pulse train laser beam having substantially homogeneous intensity, and applies the laser beam to the target supplied by the target supply unit to generate plasma; and a collector mirror which collects the extreme ultra violet light radiated from the plasma and outputs it.

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Murakami et al., “Conversion Efficiency of Extreme Ultraviolet Radiation in Laser-Produced Plasmas”, American Institute of Physics, Physics of Plasmas 13, 033107 (2006), pp. 1-8.

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