Extreme ultra violet light source apparatus

Details Extreme ultra violet light source apparatus Extreme ultra violet light source apparatus

2011-04-19

2011-04-19

Kim, Robert (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S43200R, C250S424000, C250S425000

Reexamination Certificate

active

07928418

ABSTRACT:
In an extreme ultra violet light source apparatus of a laser produced plasma type, charged particles such as ions emitted from plasma are promptly ejected to the outside of a chamber. The extreme ultra violet light source apparatus includes a chamber in which extreme ultra violet light is generated, a target supply unit for supplying a target material to a predetermined position within the chamber, a driver laser for applying a laser beam to the target material supplied by the target supply unit to generate plasma, a collector mirror for collecting the extreme ultra violet light radiated from the plasma to output the extreme ultra violet light, a magnetic field forming unit for forming an asymmetric magnetic field in a generation position of the plasma by using a coil, and a charged particle collection mechanism provided on at least one of two surfaces of the chamber to which lines of magnetic force generated by the coil extend.

REFERENCES:
patent: 6987279 (2006-01-01), Hoshino et al.
patent: 2009/0261242 (2009-10-01), Ueno et al.
patent: 2010/0243922 (2010-09-01), Asayama et al.
patent: 2005-197456 (2005-07-01), None

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