Extreme ultra violet light source apparatus

Details Extreme ultra violet light source apparatus Extreme ultra violet light source apparatus

2011-04-12

2011-04-12

Kim, Robert (Department: 2881)

Radiant energy

Radiant energy generation and sources

C250S50400H, C250S42300F, C250S424000, C250S425000, C250S494100

Reexamination Certificate

active

07923705

ABSTRACT:
An EUV light source apparatus capable of easily detecting deterioration etc. of a window of an EUV light generating chamber. The EUV light source apparatus includes a driver laser, an EUV light generating chamber, a window which passes the laser beam into the EUV light generating chamber, an EUV light collector mirror, laser beam focusing optics which focuses a laser beam onto a trajectory of a target material, a temperature sensor which detects a temperature of the window, and a laser beam optics deterioration determination processing unit which determines deterioration of the window based on the temperature of the window detected by the temperature sensor when extreme ultra violet light is generated.

REFERENCES:
patent: 2010/0171049 (2010-07-01), Moriya et al.
patent: 2010/0200776 (2010-08-01), Yabu et al.
patent: 2003-229298 (2003-08-01), None

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