Extraction electrode system for high current ion implanter

Details Extraction electrode system for high current ion implanter Extraction electrode system for high current ion implanter

2011-03-29

2011-03-29

Souw, Bernard E (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S397000

Reexamination Certificate

active

07915597

ABSTRACT:
A system and method extraction electrode system, comprising an extraction electrode, wherein the extraction electrode, further defines an aperture and forms a portion of the outside wall of the ion source and is configured to extract ions from the ion source, a suppression disk half assembly comprising two suppression electrode plate disk halves that form a variable suppression aperture, a ground disk half assembly comprising two ground electrode plate disk halves that form an variable ground aperture, wherein the suppression disk half assembly is configured between the extraction electrode and the ground disk half assembly, wherein the suppression aperture and the ground aperture variable in the direction perpendicular to the ion beam direction of travel, and wherein the extraction electrode system is used with a pendulum reciprocating drive apparatus.

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