Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2007-12-04
2007-12-04
Mariam, Daniel (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S199000, C382S203000
Reexamination Certificate
active
10644001
ABSTRACT:
An extracting method of a pattern contour, includes acquiring an image of a pattern to be inspected, calculating a schematic edge position of the pattern from the image, preparing an approximate polygon by approximating a polygon consisting of edges having predetermined direction components to a contour shape of the pattern on the basis of the calculated edge position, dividing the approximate polygon into star-shaped polygons, calculating the position of a kernel of the star-shaped polygon, and searching an edge of the pattern in a direction connecting the kernel to an arbitrary point positioned on the edge of the approximate polygon.
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Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Mariam Daniel
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