Coherent light generators – Particular active media – Gas
Reexamination Certificate
2008-01-22
2008-01-22
Nguyen, Dung T. (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S057000
Reexamination Certificate
active
07321607
ABSTRACT:
A gas discharge laser and method of operating same is disclosed which may comprise a gas discharge laser chamber support structure comprising a first support arm attached to a mounting table; a gas discharge laser chamber slideably engaging the first support arm; an first optical element sensitive to chamber vibration positioned at a first end of the laser chamber mounted on the mounting table; the laser chamber support structure being without connection to the first optical element. The apparatus and method may also comprise a second optical element sensitive to chamber vibration positioned at the second end of the laser chamber mounted on the mounting table; the laser chamber support structure being without connection to the second optical element. The first optical element may comprise a line narrowing optical arrangement and the second optical element comprising an output coupler.
REFERENCES:
patent: 3593189 (1971-07-01), Buhrer
patent: 3989360 (1976-11-01), Duchet
patent: 4223279 (1980-09-01), Bradford, Jr. et al.
patent: 4455658 (1984-06-01), Sutter, Jr.
patent: 4697270 (1987-09-01), Galkowski
patent: 4798467 (1989-01-01), Wyeth et al.
patent: 4817101 (1989-03-01), Wyeth et al.
patent: 4823354 (1989-04-01), Znotins et al.
patent: 4881231 (1989-11-01), Jain
patent: 4883352 (1989-11-01), Bruning
patent: 4940331 (1990-07-01), Wyeth et al.
patent: 4959840 (1990-09-01), Akins et al.
patent: 5023884 (1991-06-01), Akins et al.
patent: 5025445 (1991-06-01), Anderson et al.
patent: 5025446 (1991-06-01), Kuizenga
patent: 5083093 (1992-01-01), Adler et al.
patent: 5095292 (1992-03-01), Masterton
patent: 5095492 (1992-03-01), Sandstrom
patent: 5128601 (1992-07-01), Orbach et al.
patent: 5189678 (1993-02-01), Ball et al.
patent: 5315611 (1994-05-01), Ball et al.
patent: 5371587 (1994-12-01), De Groot et al.
patent: 5373515 (1994-12-01), Wakabayashi et al.
patent: 5420877 (1995-05-01), Sandstrom
patent: 5440578 (1995-08-01), Sandstrom
patent: 5448580 (1995-09-01), Birx et al.
patent: 5450207 (1995-09-01), Fomenkov
patent: 5524144 (1996-06-01), Suzuki
patent: 5656882 (1997-08-01), Lazarus et al.
patent: 5691989 (1997-11-01), Rakuljic
patent: 5706301 (1998-01-01), Lagerstrom
patent: 5754571 (1998-05-01), Endoh et al.
patent: 5770933 (1998-06-01), Larson et al.
patent: 5771258 (1998-06-01), Morton et al.
patent: 5835520 (1998-11-01), Das et al.
patent: 5848089 (1998-12-01), Sarkar et al.
patent: 5852621 (1998-12-01), Sandstrom
patent: 5852627 (1998-12-01), Ershov
patent: 5870420 (1999-02-01), Webb
patent: 5898725 (1999-04-01), Fomenkov et al.
patent: 5953360 (1999-09-01), Vitruk et al.
patent: 5978394 (1999-11-01), Newman et al.
patent: 5978405 (1999-11-01), Juhasz et al.
patent: 5978409 (1999-11-01), Das et al.
patent: 5991324 (1999-11-01), Knowles et al.
patent: 6005879 (1999-12-01), Sandstrom et al.
patent: 6018537 (2000-01-01), Hofmann et al.
patent: 6021150 (2000-02-01), Partio et al.
patent: 6028879 (2000-02-01), Ershov
patent: 6038055 (2000-03-01), Hansch et al.
patent: 6067311 (2000-05-01), Morton et al.
patent: 6078599 (2000-06-01), Everage et al.
patent: 6094448 (2000-07-01), Fomenkov et al.
patent: 6104735 (2000-08-01), Webb
patent: 6109574 (2000-08-01), Pan et al.
patent: 6128323 (2000-10-01), Myers et al.
patent: 6163559 (2000-12-01), Watson
patent: 6164116 (2000-12-01), Rice et al.
patent: 6192064 (2001-02-01), Algots et al.
patent: 6208674 (2001-03-01), Webb et al.
patent: 6208675 (2001-03-01), Webb
patent: 6212217 (2001-04-01), Erie et al.
patent: 6219368 (2001-04-01), Govorkov
patent: 6240110 (2001-05-01), Ershov
patent: 6240112 (2001-05-01), Partlo et al.
patent: 6243405 (2001-06-01), Borneis et al.
patent: 6263002 (2001-07-01), Hsu et al.
patent: 6317447 (2001-11-01), Partlo et al.
patent: 6348357 (2002-02-01), Sano
patent: 6404158 (2002-06-01), Boisvert et al.
patent: 6477193 (2002-11-01), Oliver et al.
patent: 6493364 (2002-12-01), Baumler et al.
patent: 6493374 (2002-12-01), Fomenkov et al.
patent: 6496528 (2002-12-01), Titus et al.
patent: 6529531 (2003-03-01), Everage et al.
patent: 6529533 (2003-03-01), Vos
patent: 6532247 (2003-03-01), Spangler et al.
patent: RE38054 (2003-04-01), Hofmann et al.
patent: 6650666 (2003-11-01), Spangler et al.
patent: 6671294 (2003-12-01), Kroyan et al.
patent: 6721340 (2004-04-01), Fomenkov et al.
patent: 6738410 (2004-05-01), Partlo et al.
patent: 6760358 (2004-07-01), Zimmermann et al.
patent: 6778584 (2004-08-01), Partlo et al.
patent: 6853653 (2005-02-01), Spangler et al.
patent: 2002/0167986 (2002-11-01), Pan et al.
patent: 63217687 (1988-09-01), None
patent: 64-042564 (1989-02-01), None
patent: 03-217062 (1991-09-01), None
patent: 04-305987 (1992-10-01), None
patent: 04-314374 (1992-11-01), None
patent: 04076976 (1992-11-01), None
patent: 05-167172 (1993-07-01), None
patent: 06-005952 (1994-01-01), None
patent: 06-021543 (1994-01-01), None
patent: 06-152007 (1994-05-01), None
patent: 10-284790 (1998-10-01), None
patent: 2000-058944 (2000-02-01), None
patent: 11-035615 (2000-08-01), None
patent: 2002-509363 (2002-03-01), None
patent: WO99/31773 (1999-06-01), None
Cray William
Cymer Inc.
Nguyen Dung T.
LandOfFree
External optics and chamber support system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with External optics and chamber support system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and External optics and chamber support system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2777137