Exposure state detecting system and exposure apparatus using the

Details Exposure state detecting system and exposure apparatus using the Exposure state detecting system and exposure apparatus using the

1996-05-15

1998-07-07

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356394, G01B 1100

Patent

active

057777446

ABSTRACT:
A state-of-formation detecting system for detecting a state of formation of a periodic pattern formed, through exposure light, upon an object with a photosensitive material applied thereto, includes a light projecting device for projecting input light onto the periodic pattern, and a determining device for receiving signal light from the periodic pattern and for detecting a change in the input light, to determine the state of formation of the periodic pattern on the basis of the change in the input light.

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