Photocopying – Projection printing and copying cameras – With developing
Reexamination Certificate
2004-12-29
2009-12-08
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
With developing
C355S067000, C396S611000, C430S030000, C430S311000
Reexamination Certificate
active
07630052
ABSTRACT:
An exposure processing system comprises an exposure apparatus to expose a resist on a wafer, a heating apparatus comprising heating apparatus units, the heating apparatus heating the exposed resist by a heating apparatus unit in the heating apparatus units, a developing apparatus comprising developing apparatus units, the developing apparatus developing the exposed and heated resist by a developing apparatus unit in the developing apparatus units, and a control apparatus to control the exposure apparatus by using correction data so that a wafer on process object being exposed, the correction data being data for correcting a dimensional dispersion of a resist pattern caused by a pair of heating apparatus unit and developing apparatus unit used for the wafer on the process object, the pair of heating and developing apparatus unit comprising a heating and developing apparatus unit in the heating and developing apparatus used for the wafer on the process object.
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Harakawa Shoichi
Higashiki Tatsuhiko
Ikeda Makato
Komine Nobuhiro
Kono Takuya
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Mathews Alan A
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