Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2005-11-08
2005-11-08
Young, Christopher G. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S022000, C430S030000
Reexamination Certificate
active
06962762
ABSTRACT:
A reticle for use in a photolithography process for exposing a photoresist layer in the production of a component which is formed from a plurality of adjacent exposed areas. The reticle includes an exposure aperture adapted to allow light to pass through the reticle, a patterned area within the exposure aperture which defines at least part of the functional design of the component, and one or more “stitching” structures located close to one or more of the edges of the exposure aperture. The “stitching” structures are arranged to create “stitching” marks on the photoresist, which can be used to determine whether the adjacent exposed areas have been accurately positioned.
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Daniels Ian
Martin Brian
Young Christopher G.
Zarlink Semiconductor Limited
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