Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2008-01-10
2011-10-18
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S055000, C355S072000, C355S077000
Reexamination Certificate
active
08040491
ABSTRACT:
An exposure apparatus exposes a substrate by projecting a pattern image onto the substrate through a liquid. The exposure apparatus includes a projection optical system by which the pattern image is projected onto the substrate, and a movable member which is movable relative to the projection optical system. A liquid-repellent member, at least a part of a surface of which is liquid-repellent, is provided detachably on the movable member, the liquid-repellent member being different from the substrate.
REFERENCES:
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4465368 (1984-08-01), Matsuura et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 5284802 (1994-02-01), Muraoka et al.
patent: 5493403 (1996-02-01), Nishi
patent: 5528118 (1996-06-01), Lee
patent: 5591958 (1997-01-01), Nishi et al.
patent: 5610683 (1997-03-01), Takahashi
patent: 5623853 (1997-04-01), Novak et al.
patent: 5633698 (1997-05-01), Imai
patent: 5646413 (1997-07-01), Nishi
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5728495 (1998-03-01), Ozawa
patent: 5825043 (1998-10-01), Suwa
patent: 5874820 (1999-02-01), Lee
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6195154 (2001-02-01), Imai
patent: 6208407 (2001-03-01), Loopstra
patent: 6341007 (2002-01-01), Nishi et al.
patent: 6381013 (2002-04-01), Richardson
patent: 6400441 (2002-06-01), Nishi et al.
patent: 6549269 (2003-04-01), Nishi et al.
patent: 6590634 (2003-07-01), Nishi et al.
patent: 6650399 (2003-11-01), Baselmans et al.
patent: 6809794 (2004-10-01), Sewell
patent: 6819414 (2004-11-01), Takeuchi
patent: 6828542 (2004-12-01), Ye et al.
patent: 6882406 (2005-04-01), Kurt et al.
patent: 6940582 (2005-09-01), Tanaka
patent: 7199858 (2007-04-01), Lof et al.
patent: 7760366 (2010-07-01), Mengel et al.
patent: 7796274 (2010-09-01), Mengel et al.
patent: 2001/0026355 (2001-10-01), Aoki et al.
patent: 2002/0041377 (2002-04-01), Hagiwara et al.
patent: 2002/0061469 (2002-05-01), Tanaka
patent: 2002/0074635 (2002-06-01), Hattori et al.
patent: 2002/0163629 (2002-11-01), Switkes et al.
patent: 2003/0030916 (2003-02-01), Suenaga
patent: 2003/0066975 (2003-04-01), Okada
patent: 2003/0108806 (2003-06-01), Chen
patent: 2003/0139620 (2003-07-01), Yamaguchi et al.
patent: 2003/0174408 (2003-09-01), Rostalski et al.
patent: 2003/0226951 (2003-12-01), Ye et al.
patent: 2004/0000627 (2004-01-01), Schuster
patent: 2004/0060195 (2004-04-01), Garcia et al.
patent: 2004/0075895 (2004-04-01), Lin
patent: 2004/0109237 (2004-06-01), Epple et al.
patent: 2004/0114117 (2004-06-01), Bleeker
patent: 2004/0118184 (2004-06-01), Violette
patent: 2004/0119954 (2004-06-01), Kawashima et al.
patent: 2004/0125351 (2004-07-01), Krautschik
patent: 2004/0136494 (2004-07-01), Lof et al.
patent: 2004/0160582 (2004-08-01), Lof et al.
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2004/0169834 (2004-09-01), Richter et al.
patent: 2004/0169924 (2004-09-01), Flagello et al.
patent: 2004/0180294 (2004-09-01), Baba-Ali et al.
patent: 2004/0180299 (2004-09-01), Rolland et al.
patent: 2004/0207824 (2004-10-01), Lof et al.
patent: 2004/0211920 (2004-10-01), Maria Derksen et al.
patent: 2004/0224265 (2004-11-01), Endo et al.
patent: 2004/0224525 (2004-11-01), Endo et al.
patent: 2004/0227923 (2004-11-01), Flagello et al.
patent: 2004/0233405 (2004-11-01), Kato et al.
patent: 2004/0253547 (2004-12-01), Endo et al.
patent: 2004/0253548 (2004-12-01), Endo et al.
patent: 2004/0257544 (2004-12-01), Vogel et al.
patent: 2004/0259008 (2004-12-01), Endo et al.
patent: 2004/0259040 (2004-12-01), Endo et al.
patent: 2004/0263808 (2004-12-01), Sewell
patent: 2004/0263809 (2004-12-01), Nakano
patent: 2005/0000941 (2005-01-01), Ward
patent: 2005/0002004 (2005-01-01), Kolesnychenko et al.
patent: 2005/0007569 (2005-01-01), Streefkerk et al.
patent: 2005/0007570 (2005-01-01), Streefkerk et al.
patent: 2005/0018155 (2005-01-01), Cox et al.
patent: 2005/0018156 (2005-01-01), Mulkens et al.
patent: 2005/0024609 (2005-02-01), De Smit et al.
patent: 2005/0030497 (2005-02-01), Nakamura
patent: 2005/0030498 (2005-02-01), Mulkens
patent: 2005/0030506 (2005-02-01), Schuster
patent: 2005/0030511 (2005-02-01), Auer-jongepier et al.
patent: 2005/0036121 (2005-02-01), Hoogendam et al.
patent: 2005/0036183 (2005-02-01), Yeo et al.
patent: 2005/0036184 (2005-02-01), Yeo et al.
patent: 2005/0036213 (2005-02-01), Mann et al.
patent: 2005/0037269 (2005-02-01), Levinson
patent: 2005/0041225 (2005-02-01), Sengers et al.
patent: 2005/0042554 (2005-02-01), Dierichs et al.
patent: 2005/0046813 (2005-03-01), Streefkerk et al.
patent: 2005/0046934 (2005-03-01), Ho et al.
patent: 2005/0048220 (2005-03-01), Mertens et al.
patent: 2005/0048223 (2005-03-01), Pawloski et al.
patent: 2005/0052632 (2005-03-01), Miyajima
patent: 2005/0068639 (2005-03-01), Pierrat et al.
patent: 2005/0073670 (2005-04-01), Carroll
patent: 2005/0074704 (2005-04-01), Endo et al.
patent: 2005/0078286 (2005-04-01), Dierichs et al.
patent: 2005/0078287 (2005-04-01), Sengers et al.
patent: 2005/0084794 (2005-04-01), Meagley et al.
patent: 2005/0088635 (2005-04-01), Hoogendam et al.
patent: 2005/0094114 (2005-05-01), Streefkerk et al.
patent: 2005/0094116 (2005-05-01), Flagello et al.
patent: 2005/0094119 (2005-05-01), Loopstra et al.
patent: 2005/0100745 (2005-05-01), Lin et al.
patent: 2005/0106512 (2005-05-01), Endo et al.
patent: 2005/0110973 (2005-05-01), Streefkerk et al.
patent: 2005/0117135 (2005-06-01), Verhoeven et al.
patent: 2005/0117224 (2005-06-01), Shafer et al.
patent: 2005/0122497 (2005-06-01), Lyons et al.
patent: 2005/0122505 (2005-06-01), Miyajima
patent: 2005/0128445 (2005-06-01), Hoogendam et al.
patent: 2005/0132914 (2005-06-01), Mulkens et al.
patent: 2005/0134815 (2005-06-01), Van Santen et al.
patent: 2005/0134817 (2005-06-01), Nakamura
patent: 2005/0136361 (2005-06-01), Endo et al.
patent: 2005/0141098 (2005-06-01), Schuster
patent: 2005/0145265 (2005-07-01), Ravkin et al.
patent: 2005/0145803 (2005-07-01), Hakey et al.
patent: 2005/0146693 (2005-07-01), Ohsaki
patent: 2005/0146694 (2005-07-01), Tokita
patent: 2005/0146695 (2005-07-01), Kawakami
patent: 2005/0147920 (2005-07-01), Lin et al.
patent: 2005/0153424 (2005-07-01), Coon
patent: 2005/0158673 (2005-07-01), Hakey et al.
patent: 2005/0164502 (2005-07-01), Deng et al.
patent: 2005/0174549 (2005-08-01), Duineveld et al.
patent: 2005/0174550 (2005-08-01), Streefkerk et al.
patent: 2005/0175776 (2005-08-01), Streefkerk et al.
patent: 2005/0175940 (2005-08-01), Dierichs
patent: 2005/0179877 (2005-08-01), Mulkens et al.
patent: 2005/0185269 (2005-08-01), Epple et al.
patent: 2005/0190435 (2005-09-01), Shafer et al.
patent: 2005/0190455 (2005-09-01), Rostalski et al.
patent: 2005/0205108 (2005-09-01), Chang et al.
patent: 2005/0213061 (2005-09-01), Hakey et al.
patent: 2005/0213072 (2005-09-01), Schenker et al.
patent: 2005/0217135 (2005-10-01), O'Donnell et al.
patent: 2005/0217137 (2005-10-01), Smith et al.
patent: 2005/0217703 (2005-10-01), O'Donnell
patent: 2005/0219481 (2005-10-01), Cox et al.
patent: 2005/0219482 (2005-10-01), Baselmans et al.
patent: 2005/0219488 (2005-10-01), Nei et al.
patent: 2005/0219499 (2005-10-01), Maria Zaal et al.
patent: 2005/0225737 (2005-10-01), Weissenrieder et al.
patent: 2005/0231694 (2005-10-01), Kolesnychenko et al.
patent: 2005/0233081 (2005-10-01), Tokita
patent: 2005/0237501 (2005-10-01), Furukawa et al.
patent: 2005/0237504 (2005-10-01), Nagasaka et al.
patent: 2005/0243292 (2005-11-01), Baselmans et al.
patent: 2005/0245005 (2005-11-01), Benson
patent: 2005/0253090 (2005-11-01), Gau et al.
patent: 2005/0259232 (2005-11-01), Streefkerk et al.
patent: 2005/0259233 (2005-11-01), Streefkerk et al.
patent: 2005/0259234 (2005-11-01), Hirukawa et al.
patent: 2005/0259236 (2005-11-01), Straaijer
patent: 2005/0263068 (2005-12-01), Hoogendam et al.
patent: 2005/0264778 (2005-12-01), Lof et al.
patent: 2005/0270505 (2005-12-01), Smith
patent: 2006/0103832 (2006-05-01), Hazelton et al.
patent: 2006/0139614 (2006-06-01), Owa et al.
patent: 2006/0141400 (2006-06-01), Hirayama et al.
patent: 2006/0192930 (2006-08-01), Iimura et al.
pat
Hirukawa Shigeru
Kudo Yoshihiko
Magome Nobutaka
Owa Soichi
Kim Peter B
Nikon Corporation
Oliff & Berridg,e PLC
Riddle Christina
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