Exposure method and exposure device

Details Exposure method and exposure device Exposure method and exposure device

2006-12-08

2011-11-08

Lauchman, Layla (Department: 2877)

Image analysis

Image transformation or preprocessing

Measuring image properties

C356S614000, C356S620000, C430S030000, C355S055000, C355S033000

Reexamination Certificate

active

08055099

ABSTRACT:
An exposure method capable of performing accurate exposure without using a large photomask. The exposure method performs exposure while relatively moving a photomask above a substrate and includes a step of performing position correction of the photomask by performing, on a front side of the photomask relatively moved in a moving direction, image recognition of a pattern prearranged on the substrate such as a line and a black matrix and by correcting deviation of the photomask with respect to the pattern, and a step of checking the position correction of the photomask by performing image recognition of a reference mark arranged on the photomask and by determining whether or not the position correction of the photomask is accurately performed in the step of performing the position correction of the photomask.

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Japanese Office Action and English translation thereof mailed Mar. 8, 2011 in Japanese application 2008-508452.
International Search Report for PCT/JP2006/324541, mailed Mar. 6, 2007.

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