Exposure method and exposure apparatus

Details Exposure method and exposure apparatus Exposure method and exposure apparatus

1988-12-23

1990-11-27

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 30, G03B 2742

Patent

active

049740180

ABSTRACT:
The invention deals with an exposure apparatus which detects environmental conditions such as atmospheric pressure, temperature and humidity in which the exposure apparatus is placed, and which maintains the projected magnification constant at all times based upon the detected values, so that the pattern can be reproduced precisely. Concretely, the apparatus comprises a detector to detect at least one of the tube temperature of the optical projecting system, humidity or atmospheric pressure near the optical system, and a control unit which controls optical characteristics based upon the signals detected by the detector. Namely, the control unit adjusts the optical characteristics depending upon the environmental conditions thereby to adjust variation in the projecting magnification and/or variation in the focal position. Thus, variation in the optical characteristics is adjusted to transfer the pattern maintaining high precision.

REFERENCES:
patent: 3563648 (1971-02-01), Baggaley et al.
patent: 3704657 (1972-12-01), Sliwkowski et al.
patent: 4425037 (1984-01-01), Hershel et al.
patent: 4699505 (1987-10-01), Komoriya et al.

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