Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2004-11-25
2010-10-19
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S052000, C355S072000, C355S077000
Reexamination Certificate
active
07817242
ABSTRACT:
Positional information (an estimate value in which a linear component of positional deviation amount is corrected) of each shot on a wafer is calculated by a statistical computation using actual measurement values of positional information of a plurality of sample shots on the wafer (step488). And, a variation amount of a non-linear component of positional deviation amount is calculated at predetermined intervals with respect to each of a plurality of measurement shots including the sample shots (step496), and judgment is made about the necessity of update of correction information based on magnitude of the calculated variation amount of a non-linear component of each measurement shot area (step498). Therefore, comparing with the case when actual values of positional information of all shots on the wafer are obtained at least once in each lot in order to update a correction value, the number of shots subject to positional information measurement and the measurement time can be reduced without fail.
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Akizuki Masahiko
Kanaya Yuho
Kawakubo Masaharu
Kikuchi Takahisa
Nakagawa Chiaki
Kim Peter B
Nikon Corporation
Oliff & Berridg,e PLC
Riddle Christina
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